Ordering Information

MEMS Flow Sensor

Symbol Connection Applicable fluid Flow rate range Model
Bamboo joint Lead terminals Air 0 to 0.1 L/min. D6F-P0001A1
0 to 1 L/min. D6F-P0010A1
Connector D6F-P0010A2
Manifold D6F-P0010AM2

Accessory(Sold separately)

Type Model
Cable D6F-CABLE2
D6F-CABLE2-L

Note:Refer to Accessories for the D6F Series in datasheet

Ratings / Characteristics

Item D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2
Flow Range (See note 1.) 0 to 0.1 L/min 0 to 1 L/min
Calibration Gas (See note 2.) Air
Flow Port Type Barb joint
Maximum outside diameter: 4.9 mm		 Manifold
Electrical Connection Lead terminals Three-pin connector
Power Supply 4.75 to 5.25 VDC
Current Consumption 15 mA max. with no load and a Vcc of 5.0 V
Output Voltage 0.5 to 2.5 VDC (Load resistance: 10 kΩ)
Accuracy ±5% FS (25°C characteristic)
Repeatability (See note 3.) ±1.0% FS ±0.4% FS
Output Voltage (Max.) 3.1 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage 10 VDC
Rated Output Voltage 4 VDC
Case PBT
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 50 kPa
Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa
Operating Temperature (See note 4.) −10 to 60°C
Operating Humidity (See note 4.) 35% to 85%
Storage Temperature (See note 4.) −40 to 80°C
Storage Humidity (See note 4.) 35% to 85%
Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of -10 to 60°C
Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 8.5 g 8.0 g

Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.

Downloads

Document File Type File Size Download
D6F-P Series Datasheet PDF 230 KB